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3-D decomposition of thin films using laser hologram

Summary

This sensor can analyze particle energy distributions from the top to the bottom of a film.

These is no limit to the thickness of the film as long as light is returned.

The buyers of this sensor may include chip makers, makers of films and equipments, real time inspection or contril of film quality.This sensor system is composed mainly of a laser and charge couplded device. The laser hologram contains information regarding complex interactions between laser and film particles. The system is based on new concepts of light. The innovative feature lies in its capability of providing particle energy distributions in 3-D film dimension from one single laser hologram. No existing sensors can do this. It is integral to 3-D assessment of internal particle energy distributions of films

Type of Cooperation

Sale, License agreement

Countries

Korea (South)

Classes

Issued patent

Coverage Areas

KOREA

Patent Information

~ 1 million

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