一種紫外綫檢測裝置

An ultraviolet detector, comprising the structure: one sapphire substrate layer; a high temperature AlN buffer layer grown on the sapphire substrate layer, the high temperature AlN buffer layer is 740 ℃ ~ 820 ℃ temperature obtained under; one temperature GaN buffer layer grown on the high temperature AlN buffer layer, the temperature of the GaN buffer layer at 600 ℃ ~ 700 ℃ temperature obtained; a gallium nitride epitaxial layer deposited on the medium-temperature GaN buffer layer; A Schottky junction layer formed on the GaN epitaxial layer; plurality of resistive contacts are formed on the GaN epitaxial layer; the high temperature AlN buffer layer and the GaN buffer layer forming temperature in a double buffer layer structure, thus improving the stability of the UV detector and radiation resistance. Wherein the high-temperature AlN buffer layer and the medium-temperature GaN buffer layer consists of radio frequency plasma enhanced molecular beam epitaxial growth technique.

Inventor: Xingquan Xu
Priority Number: CN100433372C
IPC Current: H01L003109 | G01J000102
Assignee Applicant: The Hong Kong University of Science & Technology
Title: Ultraviolet detecting apparatus | A kind of ultraviolet detecting device
Usefulness: Ultraviolet detecting apparatus | A kind of ultraviolet detecting device
Summary: Used for detecting and determining an intensity and amount of ultraviolet (UV) radiation in a cultural relic, painting, calligraphy work, rubber, plastic, eye, skin and plant, in UV sterilization, UV physiotherapy, UV fluorescent analysis and investigation and UV exposure of photolithography fields and in an industrial application such as measuring the amount of UV radiation for fire detection, biological examination and air pollution detection.
Novelty: Ultraviolet detector for e.g. fire detection, has high and intermediate temperature nitride buffer layers forming double buffer layer structure and formed by radio frequency-plasma enhanced MBE growth technology

Measurement/Testing

Measurement Tool

SURYA Charles

Mainland China