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NANOSTRUCTURED MEMS COMPONENTS VIA FRICTION STIR SUPERPLASTIC FORMING

*Abstract: Abstract of US Patent 6,655,575- Superplastic forming of micro components: A method for forming a miniaturized shaped component. Bulk superplastic material is contacted with a flat rotating surface of a rotating tool to frictionally heat the bulk superplastic material with the bulk superplastic material positioned between the flat rotating surface of the tool and a microfabricated tool die. The bulk superplastic material is forced into the microfabricated die once the bulk superplastic material is heated to a temperature between a glass transition temperature and a crystallization temperature.Non-confidential Abstract of Invention: Micro-electromechanical systems (MEMS) require fabrication of very small components and systems. MEMS microfabrication techniques usually involve micromachining and are based on Si or IC technology. Conventional metal forming techniques such as forging or extrusion cannot be miniaturized to the MEMS scale easily. New metallic glasses and nanostructured materials that exhibit superplastic behavior provide new opportunities to develop conventional metal forming for MEMS components. This invention integrates a new metal forming concept with superplastic behavior of metallic glasses and nanostructured materials to microfabricate MEMS components by forging or extrusion.

*Principal Investigation: Name: Rajiv Mishra, Associate Professor of Metallurgical Engineering
Department:

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