Developed by the University of Illinois at Urbana-Champaign, this suite of six technologies enhances multiple facets of nanolithography and scanning probe microscopy.
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Nanofabrication TechniqueMetal nanogaps with increased precision and reliability of sub-nanoscale structures can be achieved by using standard procedures for nanofabrication of metal films while adding a unique final step of atomic layer deposition and adhesive-tape based planarization. Using this f.....
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Kenneth Shepard, Ph.D.
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