Capable of exhibiting more than two data states (current memory devices). Benefits include increased memory density due to having more than two data states and ability to function as a fuse or ΓÇÿactivatedΓÇÖ memory device.
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Highly scalable Greater data density Simpler and smaller cell structure compared to MRAM Low operational voltage
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Fabrication process is self-aligned Natural frequency of the Berkeley design is less sensitive to process and environmental variations Natural frequency dependent to first order only on resonator length Anchor loss minimized Cross-sectional area can be altered to meet a large range o.....
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Superior fabrication flexibility, reliability and economics due to the elimination of substrate recesses
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Previously limited by planar geometries, the implementation of three-dimensional shell resonator gyroscopes on a wafer level was not feasible. A broad class of novel three-dimensional multi-material resonant structures and instruments for inertial applications is now enabled by the following new tec.....
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