Experiments to date using a silicon-tipped Atomic Force Microscope, enhanced with the above method, have yielded exceptional data at the nm scale. There are several markets today which would benefit from broader availability of TERS, the largest of which is the semiconductor industry. TERS can give.....
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Dr. Seok Kim from the University of IL has developed a method to fabricate a silicon based MEMS mirror and its elastomeric universal joint.
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