微波濾波網絡薄膜移相器及其制備方法
The invention discloses a thin-film phase shifter of a microwave filter network and a manufacturing method, wherein the phase shifter is formed by a substrate, a ferroelectric thin film, a surface electrode and a base electrode and has a multi-layer structure of a microwave filter network, and the microwave filter network is formed by a changeable distribution parameter portion and a non-changeable distribution parameter portion, wherein the changeable distribution parameter portion of the microwave filter network is formed on the ferroelectric thin film, and the non-changeable distribution parameter portion of the microwave filter network is formed on the substrate. The thin-film phase shifter achieves microwave phase shift through changing distributed capacitance parameter values in networks. In addition, the ferroelectric thin film which is chosen by the thin-film phase shifter is a barium titanate zirconate thin film. And therefore, the invention has the advantages of stable performance, excellent impedance matching, low loss, simple circuit topology, easy achieving technique, small size and light weight.
Inventor: WANG, Li-hua | CHEN, Xue-jiao | WANG, Yu
Priority Number: CN101388480B
IPC Current: H01P000118 | H01P000119
Assignee Applicant: The Hong Kong University of Science and Technology
Title: Thin-film phase shifter for micro-wave filter network and preparation
Usefulness: Thin-film phase shifter for micro-wave filter network and preparation
Novelty: Microwave filter network thin film phase shifter, has section/multi-section cascade microwave low-pass filter network including variable distribution parameter part that is formed on barium titanate zirconate thin film
电子
电路设计
WANG Yu
CHAN Helen
CHEN Xuejiao
中国内地
