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Process for reducing surface roughness in polycrystalline silicon thin films


总结

This technology is a rapid processing method for reducing the surface roughness of polycrystalline silicon thin-films.


技术优势

Rapidly reduces surface roughness in polycrystalline silicon thin films Can reduce surface roughness by more than 50%Can be used in reverse to create rough surfaces for other applicationsCompatible with high-throughput film production methods


技术应用

Production of high-performance thin-film transistors from silicon and other materialsTransistor arrays for LCD and OLED displaysTransistor arrays for sensing devicesTransistor arrays for flexible electronics


详细技术说明

None


国家/地区

美国

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