METHOD FOR FABRICATING MICROMACHINED STRUCTURES
- 总结
- A method for fabricating micromachined structures is provided. At least one cavity is formed on a substrate and then a dielectric material different from the material of the substrate is filled in the at least one cavity. Next, a circuitry layer including a first etch-resistant layer and a dielectric layer is formed above the at least one cavity filled with the dielectric material. A portion of the circuitry layer exposed by the first etch-resistant layer is then etched. Finally, the dielectric material in the at least one cavity is etched out.
- 技术优势
- It is an object of the present invention to provide a novel method for fabricating micromachined structures that etches both the circuitry layer and the dielectric material in the cavities of the substrate in one etching process.
- 技术应用
- manufacturing
- 申请日期
- 21-Nov-2007
- 申请号码
- 11/944,247
- 覆盖范围
- MEMS
- 国家/地区
- 美国
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