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Microfluidic systems and methods for screening plating and etching bath compositions

Summary

Lead Inventors: Alan C. West, PhD. and Mark Willey, PhD. Problem or Unmet Need:The composition of electrolyte baths used in inorganic metal finishing (e.g. electroplating and chemical etching) has a great impact on product quality (e.g. bonding, corrosion and wear resistance) and rate of deposition or etching. However, electrolyte components are traditionally screened one at a time, making optimization of electrolyte baths expensive and time-consuming. In addition, electrolyte baths for metal plating and etching are often environmental and health hazards, driving the need to reduce consumption of these chemicals. Consequently, there is a need for screening plating and etching bath compositions in a rapid, parallel, and cost-effective manner. This technology describes a microfluidic system and methods for screening electrolyte bath compositions for their effect (during metal and alloy deposition and etching processes) on substrates. The system and methods utilize screening devices with microfluidic channels in parallel, mechanisms for easily attaching and detaching substrates onto the devices, controlled movement of fluids, and electrochemical control or characterizing of plating and etching processes. The screening device allows the investigation of multiple electrolyte bath compositions in a single test setup, which may reduce the time, cost, and amount of chemicals and material required for optimization.

Technology Benefits

Rapid due to simultaneous testing of multiple electrolyte bath compositions Cost-effective due to simultaneous analysis and miniaturization (which reduces amount of material and chemicals needed) Reduces occupational and environmental hazards due to reduction of generated chemical and material waste

Technology Application

Optimizing electrolyte bath compositions for electroplating, electroless plating, electrochemical etching, chemical etching, and electropolishing of metals and alloys

Detailed Technology Description

This technology describes a microfluidic system and methods for screening electrolyte bath compositions for their effect (during metal and alloy deposition and etching processes) on substrates. The system and methods utilize screening devices with mi...

*Abstract

None

*Inquiry

Jim Aloise Columbia Technology Ventures Tel: (212) 854-8444 Email: TechTransfer@columbia.edu

*IR

M07-028

*Principal Investigator

*Publications

Willey and West, "Microfluidic Studies of Adsorption and Desorption of Polyethylene Glycol during Copper Electrodeposition," J. Electrochem. Soc., 153, C728 (2006)Willey and West, "A Microfluidic Device to Measure Electrode Response to Changes in Electrolyte Composition," Electrochemical and Solid State Letters, 9, E17 (2006)

*Web Links

WIPO: International patent application (WO/2008/070786)

Country/Region

USA