Extreme Miniaturization of On-Chip Filters for High Frequency or Wearable Electronics using Self-Rolled-up Membrane (S-RUM) Technology
- Detailed Technology Description
- Self-rolled-up Membrane (S-RuM) nanotechnology provides a novel fabrication pathway for realizing devices in 3D that are extremely small and light, with significantly enhanced functionalities.
- *Abstract
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Developed by Professor Li and her research team, Self-rolled-up Membrane (S-RuM) nanotechnology provides a novel fabrication pathway for realizing devices in 3D that are extremely small and light, with significantly enhanced functionalities. 3D radio frequency (RF) / microwave passive devices and components are created using standard CMOS compatible 2D processes.
For more information about this technology, please contact the University of Illinois at Urbana-Champaign Office of Technology Management at otm@illinois.edu.
- Country/Region
- USA
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