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Piezoelectric MEMS Resonator Technology with Integrated Phase Change Material Switches

Technology Benefits: The system:ΓÇóIs highly compact and miniaturizedΓÇóRequires a much lower voltage (1-2.5V) to programΓÇóIs capable of effectively operating at multiple frequenciesΓÇóHas a simpler fabrication, making it highly cost effectiveΓÇóAvoids use of power to keep the switch in either of the states (ON or OFF)ΓÇóHas a higher performance as compared to conventional systemsΓÇóHas a much reduced development cost as compared to conventional multi-band radiosΓÇóEffectively eliminates the necessity of shopping vendors for different frequenciesΓÇóHas a reduced component count as compared to conventional systems, allowing programming of the system even without additional RF elements such as capacitorsΓÇóUses phase-change switches that doesnΓÇÖt require creation of micro/nano scale gaps as observed with conventional switchesΓÇóHas reconfiguration functionalities, capable of operating in severely crowded and rapidly changing modern commercial and military spectral environmentΓÇóWould be commercially useful for:oImplementation of high performance RF wireless communicationoFabrication of filter platformsoVarious radio front-end applicationsoAmateur Home Radio Setups

Detailed Technology Description: None

*Abstract: Fabrication of conventional electromechanical switches is a complex procedure requiring assembly of multiple components and shopping various vendors. Such switches require a higher voltage (35-40V) to program, along with a requirement for creation of micro/nano gaps. Moreover, till date, the potential integration of these switches with piezoelectric resonators has not been very feasible. This invention relates to a novel piezoelectric MEMS resonating system with integrated phase-change material switches having low ON resistance (~5╬⌐), large ON/OFF ratio (~107), and low OFF capacitance (~40fF), overcoming prior art limitations and/or unmet needs.

*Principal Investigator: Name: Gwendolyn Hummel
Department:

Name: Matteo Rinaldi
Department:

Country/Region: USA

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