Plasma monitoring using laser hologram
- Summary
- This sensor system is composed simply of a laser, charge couplded device, and a beam expander. The laser hologram contains information regarding complex interactions between laser and plasma particles. The system is based on new concepts of light. The innovative feature lies in its capability of providing particle energy distributions in 3-D plasma space from one single laser hologram. No existing sensors can do this. It is integral to 3-D monitoring and development of plasma products.
- Technology Benefits
- This sensor system can be used to obtain energy distribution functions of plasma particles (electrons, ions, and light) in three-dimensional plasma spaces. It can be used for
plasma monitoring in mass production sites, analyzing or optimizing plasma processes or equipments, and creating new applications not possible with the existing sensors.
- Application No.
- WO2012086997
- Coverage Areas
- Korea
- Goods and Services
- Sale, License agreement
- Patent Information
- Issued patent
- Country/Region
- Korea, Republic Of
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