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Flexible Capacitive Micromachined Ultrasonic Transducer Array with Increased Effective Capacitance

Summary

A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.

Supplementary Information

Patent Number: US8531919B2
Application Number: US2010885798A
Inventor: Cheng, Ching-Hsiang | Chao, Chen
Priority Date: 21 Sep 2009
Priority Number: US8531919B2
Application Date: 20 Sep 2010
Publication Date: 10 Sep 2013
IPC Current: H01L004108
US Class: 367181
Assignee Applicant: The Hong Kong Polytechnic University
Title: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
Usefulness: Flexible capacitive micromachined ultrasonic transducer array with increased effective capacitance
Summary: Used as a capacitive micromachined ultrasonic transducer.
Novelty: Capacitive Micromachined Ultrasonic Transducer (CMUT) comprises a membrane operatively connected to a top electrode and a bottom electrode having a concave void

Industry

Biomedical

Sub Group

Medical Imaging

Others

CHENG Ching-Hsiang
CHEN Chao

Country/Region

USA

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