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MEMS Optical Scanner made from Microscopic Graphite Fibers and Method of Fabrication

详细技术说明

We report the development of novel carbon fiber-integrated MEMS (FIM)structures which can achieve extremely large deformations at high speedswith nearly fatigue-free behavior. FIM cantilevers fabricated using single 5 µmdiameter carbon fibers demonstrated tip deflections exceeding 90° atfrequencies of 8–30 kHz, and sustained these deflections for over 1010cycles. Using existing MEMS fabricationtechniques, carbon fiber-based MEMS optical scanners were subsequentlyfabricated with demonstrated angular scans >160° at a 2.5 kHz resonance.

其他

Publications

· Desai, Shahyaan. FiberBased MEMS. PatentUS 7,457,021. November 2008.

· Shahyaan Desai, MichaelO. Thompson, Anil N. Netravali, and S. Leigh Phoenix. Fibrous micro-composite material. Patent US 7,405,854. July 2008.

· Shahyaan Desai, Anil Netravali, Michael Thompson. Carbonfibers as a novel material for high-performance microelectromechanical systems(MEMS). 2006, Journal of Micromechanics and Microengineering, Volume 16, Number7. doi:10.1088/0960-1317/16/7/038

国家/地区

美国

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