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The Resonant Body Transistor and Oscillator
详细技术说明
A novel resonant body transistor (RBT) comprising a bulk-mode resonator with side-wall dielectric for capacitive drive and gate oxide sensing which is easier to fabricate and operates better than existing RBTs has been developed.
其他
Patent: 8,624,337 Patent application: 200880126205.7 Weinstein, Dana, Bhave, Sunil A. (2007, December 10-12). Internal dielectric transduction of a 4.5 GHz silicon bar resonator . IEEE International Electron Devices Meeting (IEDM 2007) , Washington, DC, 415-418. Weinstein, Dana, Sunil, Bhave A. (2008, June 1-5). Piezoresistive sensing of a dielectrically actuated silicon bar resonator . Solid State Sensor, Actuator and Microsystems Workshop , Hilton Head Island, South Carolina, 368-371.
国家/地区
美国
