Wafer-Level Micro-Glass Blowing
Microscopic gas confinement chambers, micro-lenses, optical switches, laser fusion targets, magnetic shielding, medication capsules, lab-on-a-chip, drug delivery systems
This invention describes a process for shaping glass on a wafer scale and how multiple micro-glass spheres can be formed simultaneously on a silicon substrate. These wafer attached spheres allow for integration with conventional micro-fabricated components and can be filled with any type of gas in post-fabrication.
Patent Number: US7694531B2
Application Number: US2006526436A
Inventor: Eklund, E. Jesper | Shkel, Andrei M.
Priority Date: 27 Sep 2005
Priority Number: US7694531B2
Application Date: 25 Sep 2006
Publication Date: 13 Apr 2010
IPC Current: C03B001910 | B29D002200 | B29D002204
US Class: 065106 | 0650211 | 065022 | 264041 | 2640464 | 264500 | 264574
Assignee Applicant: The Regents of the University of California
Title: Method and apparatus for wafer-level micro-glass-blowing
Usefulness: Method and apparatus for wafer-level micro-glass-blowing
Summary: For fabricating e.g. microscopic gas confinement chamber, vapor cells for nuclear magnetic resonance gyroscopes, micro-lamps, and hydrogen capsules for H-vehicles, laser fusion targets, lab-on-a-chip, medication capsules, and other biomedical devices.
Novelty: Microscopic glass-blowing for fabricating e.g. microscopic gas confinement chamber comprises disposing glass sheet onto substrate covering holes, heating and applying fluidic pressure through holes and forming microspheres on substrate
光学
激光
7694531
Tech ID/UC Case 18793/2006-176-0 Related Cases 2006-176-0
美国
