Improved MEMS Phase-shifting Interferometer
Wider range of applications due to faster, continuous measurement capabilities Miniaturization potential to devices that are pocket-size or smaller Less sensitivity to vibration Elimination of expensive control electronics
Measurement of high-speed transient phenomena such as fast changing biological and chemical processes (e.g. chemical diffusion, crystal and cell growth).
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Patent Number: US7564559B2
Application Number: US2006446552A
Inventor: Choo, Hyuck | Muller, Richard S. | Garmire, David | Demmel, James W. | Kant, Rishi
Priority Date: 2 Jun 2006
Priority Number: US7564559B2
Application Date: 2 Jun 2006
Publication Date: 21 Jul 2009
IPC Current: G01B000902 | G01L000124
US Class: 356450 | 3560355
Assignee Applicant: The Regents of the University of California
Title: MEMS-based, phase-shifting interferometer
Usefulness: MEMS-based, phase-shifting interferometer
Summary: Used for micro electromechanical and phase shifting interferometry system that is utilized for producing phase shift by synchronously resonating with periodically emitted electromagnetic radiation e.g. light, from a pulsed light source such as laser such as helium neon laser and argon laser, solid state, tunable dye and semiconductor laser such as diode laser, which is utilized for measuring transient optical phenomena of test object such as optical flat, photomask, flat-panel display, silicon wafer, cemented optic and air-spaced optical assembly associated with chemical diffusion, crystal growth, measurement of rapidly varying object temperature and human/animal bodies for medical diagnosis and research purpose.
Novelty: Optical device for use during e.g. measurement of rapidly varying object temperature, has reflective layer for receiving portion of pulsed input light from source, and beam splitter for separating pulsed input light
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7564559
Related Technologies Tech ID/UC Case 17705/2006-136-0 Related Cases 2006-136-0
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