MEMS Longitudinal Resonator
Fabrication process is self-aligned Natural frequency of the Berkeley design is less sensitive to process and environmental variations Natural frequency dependent to first order only on resonator length Anchor loss minimized Cross-sectional area can be altered to meet a large range of signal to noise requirements
Timing device Filter Carrier frequency
None
Patent Number: US6940370B2
Application Number: US2002140137A
Inventor: Bircumshaw, Brian L. | O'Reilly, Oliver M. | Pisano, Albert P.
Priority Date: 6 May 2002
Priority Number: US6940370B2
Application Date: 6 May 2002
Publication Date: 6 Sep 2005
IPC Current: H03H0003007 | H03H000924
US Class: 333197 | 3332191 | 333186
Assignee Applicant: The Regents of the University of California
Title: MEMS resonator and method of making same
Usefulness: MEMS resonator and method of making same
Summary: For use as stable or tunable frequency source of timing device and filter, and as carrier frequency source in communication.
Novelty: Micro-electro-mechanical system resonator for filter, has capacitive plates supported by anchors on substrate which is spaced apart from opposing end surfaces of resonating mass along longitudinal axis of mass
电子
半导体
6940370
Tech ID/UC Case 16967/2000-093-0 Related Cases 2000-093-0
美国
