Staggered Torsional Electrostatic Combdrive Micromirror
Exceptional scanning speed. Exceptional reliability. Constructed with MEMS processes. Diffraction-limited optical performance.
Laser printers.Raster-scanning projection video displays.
None
Patent Number: US7079299B1
Application Number: US2000584835A
Inventor: Conant, Robert A. | Nee, Jocelyn T. | Lau, Kam Yin | Muller, Richard S.
Priority Date: 31 May 2000
Priority Number: US7079299B1
Application Date: 31 May 2000
Publication Date: 18 Jul 2006
IPC Current: G02B002608 | B81B000300 | B81C000100
US Class: 3592241 | 359224 | 310309 | 3592006
Assignee Applicant: The Regents of the University of California
Title: Staggered torsional electrostatic combdrive and method of forming same
Usefulness: Staggered torsional electrostatic combdrive and method of forming same
Summary: For controlling a micromirror or paddle structure for mounted electronic components.
Novelty: Staggered torsional electrostatic combdrive for controlling micromirror has moving comb teeth assembly positioned entirely above stationary comb teeth assembly by predetermined vertical displacement during combdrive resting state
光学
光学元件
7079299
Tech ID/UC Case 16920/2000-045-0 Related Cases 2000-045-0
美国
