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Temperature-Robust MEMS Gyroscope with 2-DOF Sense-Mode Addressing the Tradeoff Between Bandwidth and Gain

Technology Application

Camera stabilization; personal navigation; GPS augmentation; automotive electronic stability control

Detailed Technology Description

The gyroscope has a single degree-of-freedom (DOF) drive-mode and a 2-DOF sense-mode. The design of the structure provides advantages over current gyroscope designs which were based on dynamic vibration absorber type of the 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be selected arbitrarily in the proposed design, relaxing the tradeoff between the gain, die size, and detection capacitance. The symmetry of the structure ensures the optimal location of the drive-mode resonance relative to the sense-mode operational region, even in presence of fabrication imperfections. Prototypes with 2.5 kHz operational frequency experimentally demonstrated up to 400 Hz 3 dB sense-mode bandwidth. The gyroscope’s bias and the scale factor temperature coefficients were measured as 313 °/h/°C and 351 ppm/176;C, respectively. The prototypes exhibited a rate sensitivity of 56 µV/°/s and a rate-equivalent uncompensated quadrature of 62.5 °/s. Using off-chip detection electronics, the experimentally measured resolution was 0.09 °/s/√Hz.

Supplementary Information

Patent Number: US8443667B2
Application Number: US2010918284A
Inventor: Trusov, Alexander | Schofield, Adam | Shkel, Andrei
Priority Date: 21 Feb 2008
Priority Number: US8443667B2
Application Date: 18 Aug 2010
Publication Date: 21 May 2013
IPC Current: G01C001956
US Class: 07350412 | 07350414
Assignee Applicant: The Regents of the University of California
Title: Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwith and gain
Usefulness: Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwith and gain
Summary: Three-DOF dynamic gyroscopic system for use in e.g. camera stabilization, personal navigation, global positioning system augmentation, electronic stability control in automobile.
Novelty: Three-degree of freedom (DOF) dynamic gyroscopic system for use in automobile has symmetrically-decoupled suspension subsystem that couples drive subsystem to outer frame and sense subsystem

Industry

Electronics

Sub Group

3C/Gadgets

Application No.

8443667

Others

Background

The operation of all micro-machined vibratory gyroscopes is based on a transfer of energy between two modes of vibration caused by the Coriolis effect. Conventional implementations often utilize single degree of freedom drive and sense-modes. Various groups have reported gyroscopes with structurally symmetrical designs aimed at mode-matched operation. In such implementations, the mechanical gain is increased proportionally to the sense-mode quality factor. Also, mode-matching feedback control can be employed to improve sensitivity by automatically tuning the drive- and sense-modes. However, mode-matched operation has serious drawbacks, since the increased sensitivity is achieved at the cost of sensor robustness and bandwidth. Alternatively, the modes can be designed with a certain frequency mismatch. Even though this approach improves the robustness and the bandwidth, it does not provide the optimal solution because of the restricted design space. Limitations of the single-DOF mode design dictate a tradeoff between achieved robustness/bandwidth and gain.

Tech ID/UC Case

19574/2008-503-0

Related Cases

2008-503-0

Country/Region

USA

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