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Versatile Microdischarge Devices
Detailed Technology Description
Microdischarge device technology involves fabricating miniature plasmas (i.e., microballs of ionized gas) that exhibit a unique collection of useful properties. The University's technologies use silicon and standard microelectronics fabrication techniques to produce microdischarge devices that are robust, small, efficient, and versatile at a low cost.
Countries
United States
Application No.
6815891
Country/Region
USA
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