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Integrated Optical Waveguides for Sensing of Displacement

詳細技術說明
A highly sensitiveoptical vibration and displacement sensor was designed using a cantileverincorporating a waveguide that requires none of the sensitive laser alignmentnecessary in other cantilever-based detection systems.
*Abstract

An optical vibration and displacement sensor was designed consisting of a cantilever incorporating a waveguide. Deflection of the cantilever is measured as changes in light intensity by a diode opposite the cantilever's free end. This structure requires none of the sensitive laser alignment necessary in other cantilever-based detection systems, and a single light source can be used for multiple detectors. Very high levels of sensitivity are achievable.

*Licensing
Patrick Govangpjg26@cornell.edu(607) 254-2330
其他

Patent: 7,274,835

國家/地區
美國

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