Scalable Nanomanufacturing with Near-Field Optical Lens Array Levitated by Air-Bearing
- 详细技术说明
- None
- *Abstract
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The invention discloses apparatus and methods to levitate near-field optical lens array and maintain constant gap between the lens array and substrate by using air bearing. This technique allows large scale nanoprocessing on non-ideal substrates with low equipment investment and processing cost.
- *Principal Investigation
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Name: Heng Pan, Assistant Professor
Department:
Name: Joshua Staggs, Research Assistant
Department:
- 其他
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- 国家/地区
- 美国
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