Improved MEMS Phase-shifting Interferometer
- 技术优势
- Wider range of applications due to faster, continuous measurement capabilities Miniaturization potential to devices that are pocket-size or smaller Less sensitivity to vibration Elimination of expensive control electronics
- 技术应用
- Measurement of high-speed transient phenomena such as fast changing biological and chemical processes (e.g. chemical diffusion, crystal and cell growth).
- 详细技术说明
- None
- *Abstract
-
Phase-shifting interferometers are optical phase sensors that can be used to measure fast, transient phenomena. However their commercial use has been limited due to their relatively high costs and the speed limitations on what these devices can measure. Conventional MEMS-based interferometers are costly because their parts are fabricated on separate wafers and then need to be assembled as well as aligned -- which are relatively slow, expensive, low yield steps. Moreover, some existing interferometer designs require a high temperature annealing fabrication step, and that heat is problematic for integrating electronic components.
In order to broaden the market opportunities for high-speed interferometers, researchers at UC Berkeley have developed a new MEMS-based interferometer design. In comparison to previous interferometers, this design can measure faster phenomena as well as enter more cost-constrained and portable markets. With it simpler and higher yield fabrication process, this micro-machine, batch processed interferometer is expected to be 10-times less expensive than previous designs.
The Berkeley research team has fabricated prototypes of this interferometer that can make 20 to 30 measurements per second, and has conducted tests in which the device has continuously capture more than 500 profile measurements of a transient phenomenon over 21.7 seconds.
- *IP Issue Date
- Jul 21, 2009
- *Principal Investigation
-
Name: Hyuck Choo
Department:
Name: James Demmel
Department:
Name: David Garmire
Department:
Name: Rishi Kant
Department:
Name: Richard Muller
Department:
- 附加资料
- Patent Number: US7564559B2
Application Number: US2006446552A
Inventor: Choo, Hyuck | Muller, Richard S. | Garmire, David | Demmel, James W. | Kant, Rishi
Priority Date: 2 Jun 2006
Priority Number: US7564559B2
Application Date: 2 Jun 2006
Publication Date: 21 Jul 2009
IPC Current: G01B000902 | G01L000124
US Class: 356450 | 3560355
Assignee Applicant: The Regents of the University of California
Title: MEMS-based, phase-shifting interferometer
Usefulness: MEMS-based, phase-shifting interferometer
Summary: Used for micro electromechanical and phase shifting interferometry system that is utilized for producing phase shift by synchronously resonating with periodically emitted electromagnetic radiation e.g. light, from a pulsed light source such as laser such as helium neon laser and argon laser, solid state, tunable dye and semiconductor laser such as diode laser, which is utilized for measuring transient optical phenomena of test object such as optical flat, photomask, flat-panel display, silicon wafer, cemented optic and air-spaced optical assembly associated with chemical diffusion, crystal growth, measurement of rapidly varying object temperature and human/animal bodies for medical diagnosis and research purpose.
Novelty: Optical device for use during e.g. measurement of rapidly varying object temperature, has reflective layer for receiving portion of pulsed input light from source, and beam splitter for separating pulsed input light
- 主要类别
- 电子
- 细分类别
- 半导体
- 申请号码
- 7564559
- 其他
-
Related Technologies
Tech ID/UC Case
17705/2006-136-0
Related Cases
2006-136-0
- 国家/地区
- 美国
