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Staggered Torsional Electrostatic Combdrive Micromirror

技术优势: Exceptional scanning speed. Exceptional reliability. Constructed with MEMS processes. Diffraction-limited optical performance.

*Abstract: While macro-scale mirrors are used in applications such as barcode readers, laser printers, and fiber-optic network components, macro-scale mirrors are too slow, consume too much power, are too expensive, and too bulky to be useful in portable systems.

This invention is a high-performance micro-electro mechanical system (MEMS) that can be used to control a micromirror or paddle for scanning. The invention has exceptional scanning speed, exceptional reliability (due to its simple structure), diffraction-limited optical performance, and can be produced cheaply.

The invention also includes a method to produce the device described.

*Principal Investigation: Name: Robert Conant
Department:

Name: KAM YIN LAU
Department:

Name: Richard Muller
Department:

Name: Jocelyn Nee
Department:

附加资料: Patent Number: US7079299B1
Application Number: US2000584835A
Inventor: Conant, Robert A. | Nee, Jocelyn T. | Lau, Kam Yin | Muller, Richard S.
Priority Date: 31 May 2000
Priority Number: US7079299B1
Application Date: 31 May 2000
Publication Date: 18 Jul 2006
IPC Current: G02B002608 | B81B000300 | B81C000100
US Class: 3592241 | 359224 | 310309 | 3592006
Assignee Applicant: The Regents of the University of California
Title: Staggered torsional electrostatic combdrive and method of forming same
Usefulness: Staggered torsional electrostatic combdrive and method of forming same
Summary: For controlling a micromirror or paddle structure for mounted electronic components.
Novelty: Staggered torsional electrostatic combdrive for controlling micromirror has moving comb teeth assembly positioned entirely above stationary comb teeth assembly by predetermined vertical displacement during combdrive resting state

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