Scalable Nanomanufacturing with Near-Field Optical Lens Array Levitated by Air-Bearing
- Detailed Technology Description
- None
- Others
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- *Abstract
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The invention discloses apparatus and methods to levitate near-field optical lens array and maintain constant gap between the lens array and substrate by using air bearing. This technique allows large scale nanoprocessing on non-ideal substrates with low equipment investment and processing cost.
- *Principal Investigator
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Name: Heng Pan, Assistant Professor
Department:
Name: Joshua Staggs, Research Assistant
Department:
- Country/Region
- USA
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