The invention delivers record performance with significant cost saving and simplified operation to favor point-of-care applications.
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-Highly active non-precious-metal containing oxide catalysts for O2 electrocatalysis-Step toward implementation of hydrogen-based renewable energy-More cost-effective
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Large available surface area (samples grown on 2-inch diameter substrates, compared to areas on the order of a few micrometers achieved by prior art) Increased device efficiencies compared to c-plane devices Planar film surface Minimized surface undulations and crystallographic defects
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Small Low loss High modulation bandwidth High parameter variability
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Dielectric materials such as TiO2 or HfO2 are not just CMOS compatible and qualified, they are already available in state-of-the-art CMOS foundries.Lateral bulk resonators with narrow trenches that are filled with the transducing dielectric can be deposited conformally using atomic layer deposition......
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