Significantly improves film quality by allowing fabrication of enhanced GaN substrate layers for subsequent non-polar device fabrication; Greatly improves subsequent device performance.
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Lead Inventors: David LevyMethod and system for multimode interference based coupler are described. The method and system comprises of an access waveguide for inputting an input optical signal into the multimode interference based coupler. A multimode region couples the input waveguides to the outpu.....
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Hydrogen-free sidewall passivation No increase in resistivity for p-type layers No decrease in transparency for ITO
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