Developed by the University of Illinois at Urbana-Champaign, this suite of six technologies enhances multiple facets of nanolithography and scanning probe microscopy.
[更多]
Nanofabrication TechniqueMetal nanogaps with increased precision and reliability of sub-nanoscale structures can be achieved by using standard procedures for nanofabrication of metal films while adding a unique final step of atomic layer deposition and adhesive-tape based planarization. Using this f.....
[更多]
Kenneth Shepard, Ph.D.
[更多]