This technology is a self-cleaning high throughput organometallic vapor phase epitaxy (OMVPE) apparatus for deposition of material on substrates, and especially for epitaxial deposition of compound semiconductor materials.
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Applicable toa variety of gate conductors and polymer matricesScalable andcost-effective production process
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Substantially enhanced photocurrent densitiesPhotocurrents saturated at a very low applied biasNo greenhouse gas emissions
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