Scalable Nanomanufacturing with Near-Field Optical Lens Array Levitated by Air-Bearing
- 詳細技術說明
- None
- *Abstract
-
The invention discloses apparatus and methods to levitate near-field optical lens array and maintain constant gap between the lens array and substrate by using air bearing. This technique allows large scale nanoprocessing on non-ideal substrates with low equipment investment and processing cost.
- *Principal Investigation
-
Name: Heng Pan, Assistant Professor
Department:
Name: Joshua Staggs, Research Assistant
Department:
- 其他
-
- 國家/地區
- 美國
欲了解更多信息，請點擊 這裡
