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Wafer Scale Glass Blowing

技術應用: Microscopic gas confinement chambers, micro-lenses, optical switches, laser fusion targets, magnetic shielding, medication capsules, lab-on-a-chip, drug delivery systems

詳細技術說明: This invention describes a process for shaping glass on a wafer scale and how multiple micro-glass spheres can be formed simultaneously on a silicon substrate. These wafer attached spheres allow for integration with conventional micro-fabricated components and can be filled with any type of gas in post-fabrication.

*Abstract: Large scale confinement chambers have been created in the past using traditional glass-blowing techniques. However, conventional glass-blowing can only be used to create large components and requires the components to be made one at a time. Micro-glass spheres have previously been fabricated by letting glass particles fall through a temperature-controlled drop tower. While it is possible to create hollow spheres by introducing a blowing agent in the glass, these micro-spheres are not attached to a substrate and are therefore difficult to integrate with micro-machined components on a wafer.

*Principal Investigation: Name: E. Jesper Eklund
Department:

Name: Andrei Shkel
Department:

附加資料: Patent Number: US8151600B2
Application Number: US2008113927A
Inventor: Eklund, Erik Jesper | Shkel, Andrei M
Priority Date: 3 May 2007
Priority Number: US8151600B2
Application Date: 1 May 2008
Publication Date: 10 Apr 2012
IPC Current: C03B000931 | C03B001908 | C03B001910
US Class: 065106 | 264544
Assignee Applicant: The Regents of the University of California
Title: Self-inflated micro-glass blowing
Usefulness: Self-inflated micro-glass blowing
Summary: Method for fabricating self-inflated micro-objects. Uses include but are not limited to microlenses and small gas confinement chambers useful for drug delivery and diagnostic devices, complex three-dimensional microfluidic networks for gas analyzers or miniature drug delivery systems, spacers and hermetic enclosures for wafer-level packaging, micro discharge lamps and plasma light sources, and micro-optical components.
Novelty: Fabrication of self-inflated micro-objects on microscopic level by simultaneously forming blown micro-objects in glass sheet on wafer by continued application of thermally generated pressure for predetermined time

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