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Fabrication Of Multiple-wavelength Vertical-cavity Opto-electronic Device Arrays

*Abstract: Researchers at the University of California, Berkeley, have developed a method of fabricating multiple-wavelength vertical-cavity surface-emitting laser ("MW-VCSEL") arrays. These arrays are fabricated in a molecular beam epitaxy system or the like using two patterned substrate growth techniques. The growth techniques can be used with an in-situ laser reflectometry. One method of fabrication uses a temperature dependent growth rate to create the devices. Alternatively, uniform growth is performed followed by a temperature dependent desorption technique. These techniques provided desired wavelength span and desired characteristics.

*Principal Investigation: Name: Connie Chang-Hasnain
Department:

Name: GABRIEL LI
Department:

Name: WU-PEN YUEN
Department:

附加資料: Patent Number: US6174749B1
Application Number: US199878195A
Inventor: Yuen, Wupen | Chang Hasnain, Constance J. | Li, Gabriel S.
Priority Date: 13 May 1998
Priority Number: US6174749B1
Application Date: 13 May 1998
Publication Date: 16 Jan 2001
IPC Current: H01S0005183 | H01L003300 | H01L003310 | H01S000520 | H01S000540 | H01S000542
US Class: 438035 | 257E33069
Assignee Applicant: The Regents of the University of California
Title: Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays
Usefulness: Fabrication of multiple-wavelength vertical-cavity opto-electronic device arrays
Summary: For fabrication of multiple-wavelength vertical cavity surface-emitting laser (VCSEL) array used in increasing capacity of area network.
Novelty: Fabrication for VCSEL array, involves defining thickness difference between portions of wavelength shifting layer to define region with selected cavity mode spatial variation to be provided to VCSEL array

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