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A MEMs Based Ferrofludic Deformable Mirror for Optical Imaging and Projection

技術優勢

Use of the ferrofluid device in photolithography avoidsthe need for photolithographic masks, which must be produced separatelyfor each pattern to be etchedThe ferrofluids provide a dynamic solution, and thus there is no need for individual mirrors or moving mechanical parts

詳細技術說明

Georgetown University is seeking a partner interested in thedevelopment and commercialization of a new technology that usesmagnetically controlled ferrofluids to create specific patterns foroptical applications such as photolithography, imaging and projection.For example, this device allows the user to tailor a pattern forphotolithography using the ferrofluidic deformable mirror to reflectlight in a controlled pattern onto another surface. Unlike masks forphotolithography, the ferrofluid device can be altered so thatdifferent patterns can be produced from the single device, eliminatingthe need for multiple masks and potentially saving time and cost. Forprojection, ferrofluidic deformable mirrors may be used, for example,as an alternative to Dynamic Light Processing (DLP) technologies, whichare currently used in high definition video.

*Abstract

*Publications

Spinella-Mamo, V.; Paranjape, M. “Using genetic algorithms tocharacterize ferrofluid topographies in externally applied magneticfields.” Journal of Magnetism and Magnetic Materials. 321 (2009) 267–272.

*Stage of Development

The active region of the device consists of an array of micro-inductorsthat surround the ferrofluid. These inductors are able to locallygenerate magnetic fields to deform the ferrofluid surface in acontrolled manner. The ferrofluid surface topography is modifiedaccording to algorithms. Collimated light is reflected off of thedeformable ferrofluidic mirror onto an adjacent surface in the desiredpattern set by the user.

國家/地區

美國