Multi-level Silicon-on-insulator Process for the Fabrication of Optically Reflecting Substrates
- 詳細技術說明
- None
- *Abstract
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This invention describes a process of fabricating a variety of photo-electronic devices, especially photo-detectors and sensors using silicon-on-insulator (SOI) fabrication techniques. This Resonant Cavity Enhanced (RCE) device allows wavelength selectivity and enhanced absorption for thin absorption regions to be achieved while maintaining a high bandwidth. The substrates prepared by this method will enable inexpensive fabrication of polarization sensitive photo-detectors and detector arrays. This technology, coupled with porous Si technology can improve the sensitivity of various chemical and biological sensors. The RCE concept can also be applied to Infra-red detectors.
- 國家/地區
- 美國
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