3-D decomposition of thin films using laser hologram
- 總結
- This sensor system is composed mainly of a laser and charge couplded device. The laser hologram contains information regarding complex interactions between laser and film particles. The system is based on new concepts of light. The innovative feature lies in its capability of providing particle energy distributions in 3-D film dimension from one single laser hologram. No existing sensors can do this. It is integral to 3-D assessment of internal particle energy distributions of films
- 技術優勢
- This sensor can analyze particle energy distributions from the top to the bottom of a film.
These is no limit to the thickness of the film as long as light is returned.
The buyers of this sensor may include chip makers, makers of films and equipments, real time inspection or contril of film quality.
- 申請號碼
- WO2013176496
- 覆蓋範圍
- KOREA
- 商品和服務
- Sale, License agreement
- 專利信息
- Issued patent
- 國家/地區
- 南韓
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