Substrate holder
Synthesis of a diamond plates with a high homogeneity of thermal field on the substrate holder.
Synthesis of a large area diamond plates with a high homogeneity in thickness.
MPECVD-reactors for a heterogeneous synthesis films and coatings of a various materials, in particular for a DLC-coatings.
The design of the substrate holder provides homogeneity of thermal field on a holder and a substrate surfaces. It's allow to receive a homogeneous in thickness coatings.
09-Nov-2015
RU2015119796
PCT/RU2015/000749
The invention relates to MW-engineering and applies for a fabrication substrate holders for heterogeneous synthesis films and coatings of a various materials, in particular for a DLC-coatings. The technical result of the invention is increase of a homogeneity of thermal field on a holder surface. It's provide a fabrication of a diamond plates with a high homogeneity in thickness. The substrate holder is made of a refractory transition metal and have the form of a disk. The upper surface of the holder is polished and the lower surface of the holder includes circular grooves formed in concentric circles.
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俄羅斯
