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MEMS Optical Scanner made from Microscopic Graphite Fibers and Method of Fabrication

详细技术说明
We report the development of novel carbon fiber-integrated MEMS (FIM)structures which can achieve extremely large deformations at high speedswith nearly fatigue-free behavior. FIM cantilevers fabricated using single 5 µmdiameter carbon fibers demonstrated tip deflections exceeding 90° atfrequencies of 8–30 kHz, and sustained these deflections for over 1010cycles. Using existing MEMS fabricationtechniques, carbon fiber-based MEMS optical scanners were subsequentlyfabricated with demonstrated angular scans >160° at a 2.5 kHz resonance.
*Abstract
Technology Overview

Present day micro-electro-mechanical systems (MEMS)based actuator devices have fundamental performance issues that severely limittheir widespread commercialization. Although MEMS manufacturers have pushed todevelop silicon-based structures, the resulting systems still lack many desiredmechanical properties. A specific example is the case of MEMS based opticalscanners and switches (OMEMS). Such devices need to produce large angulardeflections (several tens of degrees) and resonant frequencies exceeding tensof kilohertz with lifetime reliability over billions of cycles.

 

Our results establish the vastly superior mechanicalbehavior of carbon fiber-based MEMS, while maintaining fabrication processescompatible with existing micromachining techniques. These novel carbon FIMstructures are shown to be successful in overcoming the fracture toughness andfatigue limitations of existing material technologies.


Potential Applications

  • Fiber OpticApplications
  • Multi-Axis MirrorArrays
  • Optical Switches
  • Optical Displays (VR/AR)
  • Bar Code Scanners
  • Laser Printers
  • 3D Scanning/Imaging
  • Mobile Projection

Advantages

  • Ability to have a large cantilever tip deflection of greaterthan 90°
  • Motion is induced at the anchor point of fiber allowing highoscillation rate
  • Adjustable resonance frequency
  • Can be integrated into existing devices using standardfabrication methods
*Licensing
Carolyn A. Theodorecat42@cornell.edu607 254 4514
其他

Publications

· Desai, Shahyaan. FiberBased MEMS. PatentUS 7,457,021. November 2008.

· Shahyaan Desai, MichaelO. Thompson, Anil N. Netravali, and S. Leigh Phoenix. Fibrous micro-composite material. Patent US 7,405,854. July 2008.

· Shahyaan Desai, Anil Netravali, Michael Thompson. Carbonfibers as a novel material for high-performance microelectromechanical systems(MEMS). 2006, Journal of Micromechanics and Microengineering, Volume 16, Number7. doi:10.1088/0960-1317/16/7/038
国家/地区
美国

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