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Resonance-Enhanced Tunable Bolometer

详细技术说明

None

*Abstract

A method for manufacturing a sensing device, such as a bolometer device or other devices. The method includes providing a substrate, e.g., silicon wafer. The method includes forming a first reflection layer overlying the substrate and forming a first electrode layer overlying the substrate. The method includes forming a sacrificial layer overlying a portion of the first reflection layer and a portion of the first electrode layer. The sacrificial layer is patterned using photolithography techniques. The patterned sacrificial layer corresponds to a cavity region. The method also forms a second electrode layer overlying the sacrificial layer and forms an elastic layer overlying the patterned sacrificial layer. The elastic layer encloses the cavity region corresponding to the patterned sacrificial layer. The method releases the sacrificial layer to form an opening in the cavity region.

*IP Issue Date

May 27, 2008

*Principal Investigation

Name: Matthieu Liger

Department:

Name: Yu-Chong "YC" Tai

Department:

Name: Jui Che Tsai

Department:

Name: Ming Chiang Wu

Department:

附加资料

Patent Number: US7378655B2
Application Number: US2004821790A
Inventor: Tai, Yu-Chong | Liger, Matthieu | Wu, Ming C. | Tsai, Jui-che
Priority Date: 11 Apr 2003
Priority Number: US7378655B2
Application Date: 9 Apr 2004
Publication Date: 27 May 2008
IPC Current: G01J000500 | G01J000326 | G01J000520
US Class: 2503381
Assignee Applicant: California Institute of Technology,Pasadena
Title: Apparatus and method for sensing electromagnetic radiation using a tunable device
Usefulness: Apparatus and method for sensing electromagnetic radiation using a tunable device
Summary: For electromagnetic radiation (claimed) in the infrared spectrum and other wavelengths, i.e. millimeter waves or visible light.
Novelty: Integrated tunable sensing apparatus for electromagnetic radiation in infrared spectrum and other wavelengths, has tunable cavity region, elastic material, reflection devices, movable gap, actuation device, and detection device

主要类别

测量/测试

细分类别

测量工具

申请号码

7378655

其他

Related Materials

Tech ID/UC Case

21692/2004-329-0

Related Cases

2004-329-0

国家/地区

美国