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MEMS Longitudinal Resonator

技术优势: Fabrication process is self-aligned Natural frequency of the Berkeley design is less sensitive to process and environmental variations Natural frequency dependent to first order only on resonator length Anchor loss minimized Cross-sectional area can be altered to meet a large range of signal to noise requirements

*Abstract: Researchers at the University of California, Berkeley have developed a MEMS device intended for high Q, stable resonance in the 2.4 GHz range. The device may be fabricated by standard silicon-on-insulator processes.

*Principal Investigation: Name: Brian Bircumshaw
Department:

Name: Oliver O'Reilly
Department:

Name: Albert Pisano
Department:

附加资料: Patent Number: US6940370B2
Application Number: US2002140137A
Inventor: Bircumshaw, Brian L. | O'Reilly, Oliver M. | Pisano, Albert P.
Priority Date: 6 May 2002
Priority Number: US6940370B2
Application Date: 6 May 2002
Publication Date: 6 Sep 2005
IPC Current: H03H0003007 | H03H000924
US Class: 333197 | 3332191 | 333186
Assignee Applicant: The Regents of the University of California
Title: MEMS resonator and method of making same
Usefulness: MEMS resonator and method of making same
Summary: For use as stable or tunable frequency source of timing device and filter, and as carrier frequency source in communication.
Novelty: Micro-electro-mechanical system resonator for filter, has capacitive plates supported by anchors on substrate which is spaced apart from opposing end surfaces of resonating mass along longitudinal axis of mass

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