Fabrication of Thin-Film, Flexible Photovoltaic Module
A new, large-area, thin-film, flexible photovoltaic structure isdisclosed, as well as a general fabrication procedure, including a preferablyroll-to-roll-type, process-chamber segregated, "continuous-motion",method for producing such a structure. A special multi-materialvapor-deposition environment is disclosed to implement an important co-evaporation,layer-deposition procedure performed in and,as part of the fabrication procedure. A structural system adapted to create avapor environment generally like that just referred to is disclosed, as is anorganization of method steps involved in the generation of such a vaporenvironment. Also, a unique, vapor-creating, materials-distributing system,which includes specially designed heated crucibles with carefully arranged,spatially distributed, localized and generally point-like, heated-nozzlesources of different metallic vapors, and a special multi-fingered, comb-like, vapor-deliveringmanifold structure is shown.
United States
6,372,538
美国
