Piezoelectric Bimorphs as Microelectrical Building Blocks and Constructions Made Using Same
- 详细技术说明
- None
- *Abstract
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The invention is a method of piezoelectric actuation. It comprises an architectural strategy that employs a "building block" that can be configured to achieve a desired motion. The building block is essentially made up of a bendable member and a straight rigid member. The invention enables: (1) larger amplitudes of deflection and angle; able to achieve angles of 90 degrees in static mode, (2) much better controllability, (3) greater stability and (4) less material strain, stress, and fatigue. The invention has applications in scanners, switches, microscope stages, and fiber optic alignment.
- 国家/地区
- 美国
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