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A Multilevel Micro Optical Bench (Yissum)
总结
Abstract of WO2006106524
A structure is presented for use in optic and electro-optic devices. The structure comprises at least one region of an amorphous KLTN-based material in a KLTN-based material. Also provided is a method of processing a KLTN-based material, comprising at least one of the following: bombarding said KLTN-based material with light ions; and etching said KLTN-based material when in amorphous state by an acid; thereby allowing fabrication of one or more optical components within the KLTN-based material.
http://v3.espacenet.com/textdoc?DB=EPODOC&IDX=WO2006106524&F=0
ID号码
14-2006-866
国家/地区
以色列
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