Membrane Nanopumps Based on Porous Alumina Thin Films, Membranes Therefor and a Method of Fabricating Such Membranes多孔氧化鋁薄膜納米泵的製作
With the development of microelectronic, micromachine and drug delivery device, there has been increasing demand for micro- or nanopumps. Micropumps are one of the most important microfluidic components, which have been mainly made by the micromachining technology. Different micropumps have their specific advantages and application fields.
The present invention deals with elctrokinetic nano-pumps. It pertains to a method using porous alumina thin films containing nano-channels to fabricate rate-controllable micro- or nano-pumps through applied electric potential.
Through the fabrication of nanochannels in alumina films, subsequent treatments and annealing process, highly efficient nanopumps can be made. The flow rate through the alumina thin film can be continuously adjusted with the intensity of the electric field.
There are several potential applications of the nanopumps based on porous alumina thin films. For examples, in the liquid drug delivery system with fully controllable, large dynamic range of pumping rates; micro-fluidics and nano-machine applications; pumps for inks of electronic paper displays; and micro-electronic cooling.
1. Low operating voltages
2. High maximum flow rate per unit area
3. Low cost of fabrication
4. Thinner electroosmotic pumps
5. Suitable for both small and large are applications
- Fully controllable liquid drug delivery system
- Microfluidics and nanomachine applications
- Pumps for inks of electronic paper displays
- Micro-electronic cooling
Patent Number: US7540717B2
Application Number: US2005144100A
Inventor: Sheng, Ping | Wang, Ning | Miao, Jianying | Yang, Zhiyu | Yang, Shihe | Zhang, Xinyi
Priority Date: 3 Jun 2005
Priority Number: US7540717B2
Application Date: 3 Jun 2005
Publication Date: 2 Jun 2009
IPC Current: F04B003702 | C21C000106 | H01L002120
US Class: 417048 | 075330 | 417053 | 438478
Assignee Applicant: The Hong Kong University of Science & Technology
Title: Membrane nanopumps based on porous alumina thin films, membranes therefor and a method of fabricating such membranes
Usefulness: Membrane nanopumps based on porous alumina thin films, membranes therefor and a method of fabricating such membranes
Summary: (A) Is useful for micropumps and nanopumps (claimed) e.g. electro-kinetic nanopumps for liquid drug delivery, microfluidics and nanomachine applications, for pumping inks on electronic papers, and for micro-electronic cooling.
Novelty: Membrane, useful for micropumps and nanopumps for liquid drug delivery, has channel passing from one side to other side, and electrode mounted on each side
生物医学
医疗装置
3 Jun 2005
US 11/144100
US 7540717
TTC.PA.238
香港
